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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The substrate is prepared via the shape fabrication step 100 for fabricating outer diameter and inner diameter, from material such as glass or aluminum alloy or the like; the polishing step 101 which is capable of making both surfaces flat; the cleaning step 102 for removing foreign matters adhered; and the inspection step 103 for inspecting a surface state of the completed substrate.
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