About: isa:398746333   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • A method of etching a semiconductor specimen in cluding the steps of: supporting the specimen to be etched in inactive vapor of an A gas and a B gas; and directing a beam of ultra-violet light upon the specimen at the area thereof to be etched, wherein A represents a gas selected from the group consisting of hydrogen, oxygen, nitrogen, methane, ethane and ammonia and B is a gas selected from the g
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software