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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • means for causing a computer to store parameters of a lithographic projection system, said parameters including a projection numerical aperture NA and a wavelength ?? of an annular illumination source, the annular illumination source having radial dimensions ranging from an inner radius ??inner to an outer radius ??outer; computer readable program code means for causing a computer to store a writ
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