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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • A method of manufacturing a semiconductor device, in particular an integrated circuit, in a silicon body, comprising providing an alignment grating at a surface for aligning the silicon body relative to masks which are used in a number of successive process steps to image patterns onto the surface of the silicon body; providing the alignment grating in the form of a strip pattern of adjacent eleva
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