m???xNx, wherein M is a metallic or semi-metallic element or combination of metallic and/or semi-metallic...http://www.google.com/patents/US20020089023?utm_source=gb-gplus-sharePatent US20020089023 - Low leakage current metal oxide-nitrides and method of fabricating sameAdvanced Patent SearchPublication numberUS20020089023 A1Publication typeApplicationApplication numberUS 09/755,691Publication dat