Embodiment 4 [0118] In this embodiment, by referring to drawings, description will be made of a method of simultaneously forming on the same substrate a pixel portion and TFTs (n-channel TFT and p-channel TFT) for forming a driver circuit in the periphery of the pixel portion. [0119] First, as shown in FIG. 18A, on a substrate 1801 consisting of glass such as barium borosilicate glass or aluminum