prov:value
| - mitation, the conductive or metallization layer 48 may comprise a layer of niobium, tungsten, iridium, molybdenum, tantalum, platinum, and palladium, or other material known to shield EMI and RFI. Thus, the metal layer 48 shields the sensing element from EMI and RFI originating from above the conductive layer. [0071] Since the conductive layer 48 is at ground potential, the EMI and RFI will set up
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