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  • 107]FIG. 5b is a top sectional view of the electrode pairs with stiffeners of FIG. 5a; [0108]FIGS. 6a-6 g are side sectional views which illustrate a fabrication process sequence for making the device of the present invention; [0109]FIG. 7a is a perspective schematic view of a pair of square-shaped plates which illustrates fluid motion for squeeze film damping; [0110]FIG. 7b is a view similar to t
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