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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The first stack of metal interconnects 881, 882, 883, 884, and second stack of metal interconnects 886, 887, 888, 889 are made of metal or metal alloy materials, such as but not limited to aluminum (Al), titanium (Ti), copper (Cu) and tungsten (W).
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