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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The capacitor electrode 9 a and gate electrode 4 a have a composite structure of a polycrystalline silicon layer with a thickness of 1,000 ??? to 2,000 ??? and a silicide layer of a high melting point metal such as Mo or W having a thickness of 1,000 ??? to 3,000 ???.
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