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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • e inter-layer insulating film 106 over the entire surface. [0135] Further, contact holes reaching the p-type impurity diffusion region 105 are opened in the inter-layer insulating film 106 and a metal such as tungsten or aluminum is buried in the contact holes to form the contact plugs 110.
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