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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • It is to be noted herein that the stage apparatus as shown in FIGS. 1 and 2 is so adapted as to achieve the object particularly without the use of a flexible tube for use otherwise in vacuum adsorption of a substrate plate to be exposed by effecting the adsorption of the substrate plate in an electrostatic system.
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