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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • As shown in FIG. 32(a), a metal such as chromium or titanium is vapor-deposited by sputtering on a rear surface of a via hole substrate 160 having a plurality of through wires 163, for allowing conduction of the through wires 163 by a metal film 161.
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