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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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prov:value
  • Substances effectively applicable as the gas for supply of carbon are gas or gasifiable hydrocarbons such as CH4, C2 H2, C2 H6, C3 H8, and C4 H10 and particularly preferred substances are CH4, C2 H2, and C2 H6 in terms of ease to handle upon production of the layer, high supply efficiency of C, and so on.
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