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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • As the adjacent films 34 a, 34 b, 16 a, and 16 b, a conductive film such as titanium nitride (TiN), tantalum (Ta), tantalum nitride (TaN), palladium (Pd), cobalt (Co), nickel (Ni), titanium (Ti), or the like, or an insulating film such as a silicon nitride film is used.
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