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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • pixel region.The gate metal layer is formed of a metallic material, such as aluminum/neodymium (Al/Nd), aluminum (Al), copper (Cu), or titanium (Ti).Then, an inorganic insulating material is deposited on an entire surface of the lower substrate including the gate patterns and a gate insulating layer 144 is formed.
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