prov:value
| - As is well known in the prior art, the barrier layer is usually chosen from the refractory metals or their alloys, such as for example, Ta, TaNX, Cr, CrNX, Ti, TiNX, W, WNX, TaSiXNY, TiSiXNY, WSiXNY, and other alloys containing one or more of these materials.
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