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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Conductive fill material 6 includes metals such as copper (Cu), aluminum (Al), tungsten (W), and various alloys of the aforementioned metals, and preferably, the conductive fill material 6 is Cu or Cu alloy for forming the interconnect 4 a structure (e.g., line or via).
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