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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Processes such as heat treatment, etching and further, polishing of a substrate are executed in a device manufacturing process, and when a mark is placed on the surface of the substrate it becomes deformed, discolored, damaged or erased, thereby making it difficult to recognize the mark.
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