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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • It is preferable that the predetermined element is Si, the first metal element is Al, the second metal element is an element selected from the group consisting of W, Ti, Ta and Nb, and the second conductive layer is a nitride of the element selected from the group consisting of W, Ti, Ta and Nb.
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