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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • ies. [0024] The top conductive layer 100 can be made from low resistivity materials, e.g., metal or metal silicides, such as tungsten (W), cobalt (Co), titanium silicide (TiSix), cobalt silicide (CoSix), nickel silicide (NiSix), or other metal or metal silicide layers.
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