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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • PCB, polyimide or other suitable polymers used as photoresists in standard photolithography and which may preferably have a thickness between 0.8 ??m and 10 ??m, for example 3 ??m, is spincoated and patterned to define the bridge anchors 26.
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