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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • A capacitor for an integrated circuit comprising:a first electrically conductive layer composed of a silicide bearing material; a dielectric layer disposed over said first electrically conductive layer, said dielectric layer including oxides of said silicide components whereby said dielectric layer comprises a compound of metal, silicon and oxygen; and a second electrically conductive layer dispos
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