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  • cess Technology, Lattice Press, Sunset Beach, CA, p. 514-538, (1986).Referenced byCiting PatentFiling datePublication dateApplicantTitleUS6383853 *Mar 6, 2001May 7, 2002Oki Electric Industry Co., Ltd.Method of fabricating semiconductor deviceUS6541861 *Jun 29, 2001Apr 1, 2003Kabushiki Kaisha ToshibaSemiconductor device manufacturing method including forming step of SOI structure and semiconductor
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