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  • ctive layers in an integrated circuitUS4579812 *3 f???vr. 19841 avr. 1986Advanced Micro Devices, Inc.Process for forming slots of different types in self-aligned relationship using a latent image maskUS4721689 *28 ao???t 198626 janv. 1988International Business Machines CorporationMethod for simultaneously forming an interconnection level and via studsUS4767723 *30 oct. 198730 ao???t 1988Internatio
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