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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The oxide insulating layer 356 has a thickness of 1 nm or more and can be formed by using as appropriate a method by which impurities such as water or hydrogen are not mixed into the oxide insulating layer 356 (e.g. sputtering).
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