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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The cap metal layer 28 is preferably formed of refractory metals and their metal nitrides, such as TiN, TaN, Ta, and W. The cap metal layer 28 preferably does not have a melting point that is as low as that for the cavity metal layer 26.
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