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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The gate line 130 may include, for example, metal or a conductive material such as aluminum (Al), aluminum alloy, molybdenum (Mo), molybdenum alloy, chromium (Cr), chromium alloy, tantalum (Ta), tantalum alloy, copper (Cu) or copper alloy.
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