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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The barrier material that forms the barrier layer 32 preferably comprises either a metal nitride such as TiN, TaN, WN, TiSiN, TiAlN, TiBN, ZrSiN, ZrAlN, MoSiN, MoAlN, TaSiN, or TaAlN, or a metal silicide such as WSix, TiSix, MoSix, TaSix, NiSix, or CoSix.
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