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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The material of the first insulating film formed on the first plane (the plane on which source electrode, drain electrode and channel are disposed) of the support substrate is not limited, for example, inorganic compound such as silicon oxide, silicon nitride, aluminum oxide, titanium oxide, organic compound such as acrylic resin, polyimide are mentioned.
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