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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The polymers usable for forming said organic polymer film include polyphenylene sulfides represented by the above formulae (II) and (III) (PPS), polymers represented by the above formula (I) (PPSO) and polymer which have been heretofore used in forming three-layer resists such as polymethyl methacrylate (PMMA) and the like.
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