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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • An about 100 nm thick silicon diffusion preventing conductive layer 4 made of refractory metal such as TiN and an oxidation resistance conductive layer 5 made of noble metal such as RuO2 (500 nm)/Ru (50 nm) are formed on the polycrystalline silicon plug 3 to form a lower electrode layer.
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