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  • A flexible and rotatable transfer arm 10 provided in the transfer chamber 4 is driven to take in a semiconductor wafer W from a cassette C, and transfer the wafer W into a desired chamber or among the process chambers 6A, 6B and 6C. In this case, the kinds of processes to be carried out in the process chambers 6A to 6C are properly chosen according to necessity, and the process chambers correspond
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