ffracting structureUS7518739Sep 17, 2004Apr 14, 2009Commissariat A L'energie AtomiqueUse of optical fourier transform for dimensional control in microelectronicsUS7522288Jul 19, 2007Apr 21, 2009Zygo CorporationCompensation of systematic effects in low coherence interferometryUS7525634Oct 25, 2007Apr 28, 2009Nova Measuring Instruments Ltd.Monitoring apparatus and method particularly useful in photo