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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • A first metal gate film 70??? formed on the first region I may include, for example, a lower film including TiN and an intermediate film including TaN, and the first metal gate film 70 formed on the second region II may include, for example, a lower film including TiN, an intermediate film including TaN, and an upper film including TiN.
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