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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • When it is determined by this orientation flat detection operation that the position of the orientation flat 1 a is not within a predetermined range, the operator is notified by means of an audible or visible alarm, such as a warning indicator, and the operator must manually correct the wafer 1 position.
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