About: photolithography

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An Entity of Type : owl:Thing, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

Attributes	Values
rdfs:label	photolithography
sameAs	dbr:Photolithography
skos:broader	furthermore other method conventional technique suitable process appropriate technique complex process series of process production process a application art complex example however means method process topic manufacturing conventional manner semiconductor manufacturing process fabrication technique technology step tool fabrication various technique complicated process semiconductor processing lithography operation surface technique known method fabrication process patterning variety of method variety of process processing manufacturing process conventional means suitable means expensive process conventional method known technique microfabrication technique patterning technique suitable method suitable technique common method known process various step semiconductor fabrication process printing technique advance in specific semiconductor patterning process subsequent processing patterned patterning method semiconductor processing method lithographic method conventional microfabrication technique conventional semiconductor fabrication technique lithographic technique semiconductor processing technique standard patterning technique lithographic process patterning approach complicated multi-step process conventional ic processing step pattern definition integrate circuit fabrication
has head	photolithography
is skos:broader of	photoresist method process apparatus photomask

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