Description
Metadata
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
reticle
Sponge
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An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
reticle
sameAs
dbr:Reticle
skos:broader
specimen
combination
device
feature
gun
guy
however
method
object
pattern
problem
scope
thing
substrate
present invention
reticle
post
tad
item
material
surface
apparatus
plate
mask
semiconductor wafer
other substrate
moa
photomask
first object
circuit pattern
error in lithography
circle dot
has head
reticle
is
skos:broader
of
method
pattern
scope
system
t
target
reticle
apparatus
wafer
mil
fig 5
fig 9
photomask
mil-dot
phase shift reticle
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