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chemical vapor deposition
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rdfs:label
chemical vapor deposition
sameAs
dbr:Chemical_vapor_deposition
skos:broader
other method
variety of technique
conventional technique
suitable process
know method
carbon nanotube
alternatively
thin film
chemical process
combination of technique
polysilicon
sputtering
vapor deposition
conventional deposition technique
deposition technique
art
example
means
method
process
instance
substrate
technology
material
various technique
plasma
suitable manner
appropriate means
deposition method
technique
number of method
such material
known method
processing technique
formed
deposition
variety of method
deposition process
semiconductor
refractory metal
various method
know technique
skill in the art
conventional means
suitable means
other process
known technique
suitable method
suitable technique
semiconductor wafer
different method
film deposition
known process
chemical vapor deposition
high temperature process
variety of deposition technique
various vapor deposition process
polysilicon film
process tool
vacuum deposition
coating process
known deposition process
known deposition technique
suitable deposition technique
vapor deposition technique
known coating method
deposited
chemical deposition
film deposition technique
physical vapor deposition
thin film technique
know deposition method
has head
deposition
has pre modifier
chemical vapor
is
skos:broader
of
sputtering
glass
process
sio2
diamond
layer
chamber
silicon
chemical vapor deposition
atomic layer deposition
mocvd
density plasma chemical vapor
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