Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
contact hole
Sponge
Permalink
An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
contact hole
skos:broader
semiconductor substrate
element
feature
however
pattern
region
shape
structure
substrate
hole
area
gate electrode
opening
portion
surface
difference in level
contact hole
fine pattern
recessed portion
has head
hole
has pre modifier
contact
is
skos:broader
of
photoresist
film
gate electrode
contact
contact hole
first feature
Alternative Linked Data Views:
ODE
Raw Data in:
CXML
|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
JSON-LD
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