About: electron beam

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About: electron beam Sponge Permalink

An Entity of Type : owl:Thing, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

Attributes	Values
rdfs:label	electron beam
sameAs	dbr:Cathode_ray
skos:broader	furthermore other source excimer laser nm ray energy source welding heating source appropriate method charge particle irradiation agent art device energy example light means method other process source system parameter particle limited to present invention test sample type of radiation high energy ionize radiation irradiation method radiation curing radiation energy thermal energy wave-like radiant energy technology chemical film form material step radiant energy actinic radiation corpuscular radiation high energy radiation high-energy radiation particle radiation high energy source inspection system other energy source suitable radiation source lithography heating technique wave source of radiation radiation source known method electric field beam of charge particle beam of energetic particle charge particle beam charge beam charged particle beam charged-particle beam energetic beam energy beam high energy beam radiation beam radiation various method beam laser coating heat suitable means electromagnetic radiation other technique suitable method radiation sterilization particle beam euv actinic ray radiant ray form of electromagnetic radiation form of high energy exposure tool film deposition
has head	beam
has pre modifier	electron
is skos:broader of	wavelength ultraviolet means process system x-ray material scanning

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