About: ion implantation

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About: ion implantation Sponge Permalink

An Entity of Type : owl:Thing, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

Attributes	Values
rdfs:label	ion implantation
sameAs	dbr:Ion_implantation
skos:broader	other method variety of technique conventional technique various process appropriate technique know method process step subsequent processing step similar process ion implantation application art however means method process source system treatment advantage impurity substrate addition material step fabrication random process doping technique known method fabrication process processing technique surface modification formed manufacture n-type dopant variety of application know technique processing suitable means conventional method known technique suitable method standard technique well-known technique well-known method doping method semiconductor art doping process high energy process semiconductor device fabrication process impurity introduction doping technique semiconductor device fabrication technique semiconductor processing step
has head	implantation
has pre modifier	ion
is skos:broader of	arsenic phosphorus ion implantation hydrogen

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