About: metal layer

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About: metal layer Sponge Permalink

An Entity of Type : owl:Thing, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

Attributes	Values
rdfs:label	metal layer
skos:broader	multi-layer film low work function metal electrode device element however metal method n pattern process structure substrate present invention single layer gold hole film material step tube conductive material thin layer portion surface conductor conductive layer metal layer fig 3 gate layer coating reflective layer dielectric layer thin metal layer additional layer insulator layer plurality of layer transparent conductive layer multilayer structure single metal layer reflection layer
has head	layer
has pre modifier	metal
is skos:broader of	al cu base layer au mo pad nus titanium aluminium aluminum al polysilicon ito sputtering tantalum device element example metal region aluminum moreover substrate w present invention copper shield ag ta molybdenum tungsten aluminum alloy electroplating gold hole like area material step diffusion barrier barrier opening portion surface wall chrome electrode formation nickel silver stainless steel tin metal layer intermediate layer e.g fig 1

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