About: plasma etching

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About: plasma etching Sponge Permalink

An Entity of Type : owl:Thing, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

Attributes	Values
rdfs:label	plasma etching
sameAs	dbr:Plasma_etching
skos:broader	furthermore other method chemical etching suitable process dry plasma process art means method process limited to semiconductor manufacturing process technology standard step technique etching fabrication process wafer variety of way other technique suitable method suitable technique etching process plasma etching etch process plasma processing dry etching dry etching method etching technique known etching technique
has head	etching
has pre modifier	plasma
is skos:broader of	carbon oxygen rie sf6 plasma etching reactive ion etching

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