Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
oxide layer
Sponge
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An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
oxide layer
skos:broader
alternatively
semiconductor substrate
example
method
process
region
contaminant
impurity
substrate
material
oxide
conductive material
surface
surface layer
semiconductor device
insulator
layer of material
layer
oxide layer
dielectric layer
protective layer
insulator layer
spacer layer
wafer surface
layer 26
thickness of a layer
has head
layer
has pre modifier
oxide
is
skos:broader
of
silicon dioxide
silicon oxide
metal
region
p
material
oxide
time
sio2
manganese
aluminum oxide
barrier layer
layer
silicon
oxide layer
tio2
semiconductor wafer
silicon dioxide layer
thermal oxidation
Alternative Linked Data Views:
ODE
Raw Data in:
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N3/Turtle
JSON
XML
) | OData (
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JSON
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HTML
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