Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
barrier layer
Sponge
Permalink
An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
barrier layer
sameAs
dbr:Diffusion_barrier
skos:broader
nitride
thin film
laminate
application
metal
method
structure
substrate
present invention
area
film
material
oxide
step
barrier
polymer
surface
conductor
electrode
insulator
semiconductor
barrier layer
layer of material
layer
coating
more layer
thickness
oxide layer
dielectric layer
additional layer
other layer
titanium nitride
other barrier layer
has head
layer
has pre modifier
barrier
is
skos:broader
of
embodiment of the invention
silica
dielectric material
silicon dioxide
nus
titanium
alumina
aluminum al
cerium
tantalum
example
metal
method
structure
w
copper
metal element
ag
tungsten
film
material
oxide
silicon nitride
gate electrode
foil
barrier
opening
surface
wall
nickel
aluminum oxide
tin
barrier layer
refractory metal
layer
plastic
silicon
thickness
ti
ruthenium
titanium oxide
oxide of silicon
tantalum ta
titanium nitride
barrier layer 14
first barrier layer
inorganic layer
second barrier layer
tantalum nitride
nitride tantalum
titanium nitride tin
Alternative Linked Data Views:
ODE
Raw Data in:
CXML
|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
JSON-LD
About
OpenLink Virtuoso
version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software