Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
nitride
Sponge
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An Entity of Type :
owl:Thing
, within Data Space :
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associated with source
dataset(s)
Attributes
Values
rdfs:label
nitride
sameAs
dbr:Nitride
skos:broader
dielectric material
titanium
other material
nitride
high thermal conductivity
tantalum
carbon
example
group
metal
powder
spacer
substance
composition
impurity
chemical compound
copper
dielectric
conventional dielectric
known material
insulative material
nonconductive material
stable material
tungsten
barrier material
compound
film
material
oxide
conductive material
inorganic material
suitable material
hard material
multiple layer
ceramic
embodiment
further
mixture
appropriate material
insulator
carbide
ceramic material
inorganic oxide
metal compound
layer
coating
alloy
periodic table
dielectric layer
suitable dielectric material
passivation layer
dielectric film
hard mask
suitable insulator
mask material
phosphor material
interstitial compound
has head
nitride
is
skos:broader
of
al
gan
si
titanium
nitride
zirconium
aln
aluminum nitride aln
tantalum
si3n4
silicon carbide
c
carbon
combination
metal
aluminum
sin
oxygen
tungsten
compound
material
oxide
tan
silicon nitride si3 n4
silicon nitride
sio2
ceramic
polyimide
nickel
carbide
aluminum oxide
tin
barrier layer
layer
silicon
boron
cr
al2o3
ti
phosphoric acid
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