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silicon nitride
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rdfs:label
silicon nitride
sameAs
dbr:Silicon_nitride
skos:broader
furthermore
dielectric material
silicon dioxide
preferably
of
materials
other material
nitride
high thermal conductivity
thin film
different material
similar material
silicon compound
alumina
silicon oxide
hf
advanced material
alternative material
expensive material
several material
oxynitride
other dielectric
metal nitride
high dielectric constant material
art
example
however
metal
process
structure
substance
also
composition
substrate
dielectric
inorganic particle
insulative material
nonconductive material
film
material
oxide
metal oxide
nitrogen
organic material
thin layer
inorganic material
silicon nitride
suitable material
hard material
exposed
diffusion barrier
ceramic
embodiment
further
material for use
appropriate material
composite material
inorganic compound
rigid material
such material
first
insulator
wafer
carbide
deposition
ceramic material
transparent material
barrier layer
number of material
inorganic substance
boride
layer
mask
coating
silicon
other embodiment
nitride compound
dielectric layer
first layer
high refractive index
protective layer
polycrystalline silicon
layer of dielectric material
insulation layer
insulative layer
hard mask material
advanced ceramic
silicide
suitable dielectric material
other dielectric material
passivation layer
dielectric film
hard mask
deposit layer
insulation film
inorganic dielectric material
use dielectric material
amorphous silicon
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