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silicon dioxide
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rdfs:label
silicon dioxide
sameAs
dbr:Silicon_dioxide
skos:broader
solid material
filler
silica
variety of material
dielectric material
silicate
conventional material
silicon dioxide
alternatively
other material
thin film
low k dielectric material
different material
similar material
various material
silicon compound
insulation material
silicon oxide
hydroxyethyl cellulose
semiconductor substrate
vapor deposition
suitable substance
surface of a substrate
a
agent
art
combination
element
example
glass
metal
powder
region
substance
particle
substrate
present invention
such as
oxygen
thereafter
fine particle
dielectric
conventional dielectric
inorganic particle
insulative material
oxide material
case
chemical
compound
film
form
material
oxide
part
solid
metal oxide
inorganic material
suitable material
excipient
semiconductor material
combination of material
quartz
anti-caking agent
bulk material
electrical insulator
good insulator
additionally
ceramic
embodiment
further
mineral
polymer
surface
appropriate material
flexible material
inorganic compound
such material
inorganic pigment
fig 2b
insulator
formed
deposition
coefficient of thermal expansion
semiconductor
sand
ceramic material
inorganic oxide
transparent material
barrier layer
inorganic substance
fig 5
layer
coating
pigment
silicon
periodic table
oxide layer
substrate material
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