Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
cf4
Sponge
Permalink
An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
cf4
sameAs
dbr:Tetrafluoromethane
skos:broader
gas mixture
process gas
reactive gas
reactant gas
example
nature
process
good option
chlorine
fluorine
impurity
halogenate hydrocarbon
gas
case
compound
plasma
etching gas
fluorocarbon
further
etching method
chemistry
compound contain fluorine
perfluorocarbon
sf6
etch chemistry
etch gas
etchant gas
fluorinate gas
fluorine source gas
fluorine-based gas
fluorine-containing gas
fluorocarbon gas
pfc gas
pfc
etch process
etching reagent
has head
cf4
Alternative Linked Data Views:
ODE
Raw Data in:
CXML
|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
JSON-LD
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